Principles of microelectromechanical systems
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Principles of microelectromechanical systems
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| Genre | |
|---|---|
| Other Titles |
Principles of MEMS |
| Physical Description |
1 PDF (xii, 667 pages) Also available in print |
| Language |
English |
| Item Description |
Title from title screen (viewed Feb. 10, 2011). |
| Publisher |
Hoboken, New Jersey :
WILEY/IEEE Press,
c2011.
|
| Subjects | |
| Additional Information | Ki Bang Lee |
| Painettu |
9780470466346 |
| Bibliography |
Includes bibliographical references and index. |
| ISBN |
9780470649671 ebook cloth electronic |
| DOI | 10.1002/9780470649671 |
| Access | Luettavissa Jyväskylän yliopiston verkossa; Access limited to Jyväskylä University network |
| Notes |
IEEE |
| Standard Codes |
doi 10.1002/9780470649671 |
| Publisher or Distributor Number |
IEEE 5628438 IEEE ocn701472338 |
| Get full text | |