Journal of Vacuum Science & Technology A

Journal of Vacuum Science & Technology A

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Published by AVS through the American Institute of Physics

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Language

English

Publisher

UNITED STATES Published by AVS through the American Institute of Physics

Subjects

Engineering → Electronics

Engineering → Mechanical Engineering

Material Science and Metallurgy → Coatings and Films

Material Science and Metallurgy → General and Others

Material Science and Metallurgy → Nanomaterials

Physics → General and Others

Physics → Plasma Physics

Additional form

1520-8559

ISSN

0734-2101